Mechanism and Experiment Study of Non-Contact Ultrasonic Assisted Grinding

Ultrasonic-assisted grinding processing can effectively reduce the surface roughness and enhance efficiency in of hard brittle materials. However, most common ultrasonic assisted is a type contact where tool directly contacts workpiece, which means that it necessary to accurately control pre-pressure on workpiece. The will inevitably increase complexity device, easy wear workpiece because improper control. In this paper, non-contact method proposed machining mechanism revealed. resonant frequency vibration system amplitude working face were simulated experimentally tested, respectively. Then, experiment sapphire wafer was carried out. result showed could by 48.6%. Compared with traditional under certain conditions, experimental results show has better effects reducing roughness, improving efficiency, quality uniformity surface.